Structural and optical properties of high density Si-ncs...

Materials Science and Engineering: B 2008 Vol. 147; Iss. 2-3

Structural and optical properties of high density Si-ncs synthesized in SiNx:H by remote PECVD and annealing

M. Carrada, A. Zerga, M. Amann, J.J. Grob, J.P. Stoquert, A. Slaoui, C. Bonafos, S. Schamm
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Volume:
147
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.mseb.2007.09.042
File:
PDF, 514 KB
english, 2008
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