Effect of O 3 and Aqueous Ammonia on Crystallization of MgO Thin Film Grown by Mist Chemical Vapor Deposition
Kawaharamura, Toshiyuki, Mori, Kazuharu, Orita, Hiroyuki, Shirahata, Takahiro, Fujita, Shizuo, Hirao, TakashiVolume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.52.035501
Date:
March, 2013
File:
PDF, 867 KB
english, 2013