Investigations of the Adhesion of Maleic Anhydride/Cyclic...

The Journal of Adhesion 2002 / 01 Vol. 78; Iss. 1

Investigations of the Adhesion of Maleic Anhydride/Cyclic Olefin Alternating Copolymers to Silicon Substrates: Improved Materials for 193 nm Lithography

Pasquale, Anthony J., Long, Timothy E., Truong, Hoa, Allen, Robert D.
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Volume:
78
Language:
english
Journal:
The Journal of Adhesion
DOI:
10.1080/00218460210378
Date:
January, 2002
File:
PDF, 496 KB
english, 2002
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