Microscopic underpinnings of defect nucleation and growth in silicon crystal growth and wafer processing
Talid Sinno, Jianguo Dai, Sumeet S. KapurVolume:
159-160
Year:
2009
Language:
english
Pages:
6
DOI:
10.1016/j.mseb.2008.12.040
File:
PDF, 724 KB
english, 2009