An Experimental Analysis of Residual Stress Measurements in Porous Silicon Using Micro-Raman Spectroscopy
Zhen-Kun, Lei, Yi-Lan, Kang, Ming, Hu, Yu, Qiu, Han, Xu, Hong-Pan, NiuVolume:
21
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/21/2/053
Date:
February, 2004
File:
PDF, 236 KB
english, 2004