High-speed deposition of dense, dendritic and porous SiO2 films by Nd: YAG laser chemical vapor deposition
Jun Endo, Akihiko Ito, Teiichi Kimura, Takashi GotoVolume:
166
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.mseb.2009.12.047
File:
PDF, 985 KB
english, 2010