Structure and Electrical Properties of Titanium Nitride...

Japanese Journal of Applied Physics 1978 / 1 Vol. 17; Iss. 1

Structure and Electrical Properties of Titanium Nitride Films

Igasaki, Yasuhiro, Mitsuhashi, Hiroji, Azuma, Koichi, Muto, Tokio
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
17
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.17.85
Date:
January, 1978
File:
PDF, 1.85 MB
1978
Conversion to is in progress
Conversion to is failed