Effect of deposition temperature on the properties of...

Effect of deposition temperature on the properties of nitrogen-doped AZO thin films grown on glass by rf reactive magnetron sputtering

Shinho Cho, Heetae Kim
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Volume:
172
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.mseb.2010.06.008
File:
PDF, 334 KB
english, 2010
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