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Electronic properties of silicon nanoneedle structure obtained by RIE for nonvolatile memory applications
Sungwook Jung, Jinsu Yoo, Yungkuk Kim, Kyunghae Kim, S.K. Dhungel, J. YiVolume:
26
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.msec.2005.09.088
File:
PDF, 312 KB
english, 2006