[IEEE 2011 Winter Simulation Conference - (WSC 2011) - Phoenix, AZ, USA (2011.12.11-2011.12.14)] Proceedings of the 2011 Winter Simulation Conference (WSC) - A virtual equipment as a test bench for evaluating Virtual Metrology algorithms
Mattes, Andreas, Koitzsch, Matthias, Lewke, Dirk, Muller-Zell, Michael, Schellenberger, MartinYear:
2011
Language:
english
DOI:
10.1109/wsc.2011.6147902
File:
PDF, 631 KB
english, 2011