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[IEEE 2008 International Interconnect Technology Conference - IITC - Burlingame, CA, USA (2008.06.1-2008.06.4)] 2008 International Interconnect Technology Conference - A Self-Aligned Air Gap Interconnect Process
Chen, Hsien-Wei, Jeng, Shin-Puu, Tsai, Hao-Yi, Liu, Yu-Wen, Yu, CH, Sun, YCYear:
2008
Language:
english
DOI:
10.1109/iitc.2008.4546917
File:
PDF, 2.97 MB
english, 2008