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Influence of plasma discharge on the structure of polytetrafluoroethylene film and step coverage on polymer substrate
K.P. Grytsenko, P.M. Lytvyn, J. Friedrich, R.D. Schulze, S. SchraderVolume:
27
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.msec.2006.09.029
File:
PDF, 681 KB
english, 2007