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[IEEE IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop - Munich, Germany (31 March-1 April 2003)] Advanced Semiconductor Manufacturing Conference and Workshop, 2003 IEEEI/SEMI - An overview of thermal management for next generation microelectronic devices
Tonapi, S.S., Fillion, R.A., Schattenmann, F.J., Cole, H.S., Evans, J.D., Sammakia, B.G.Year:
2003
Language:
english
DOI:
10.1109/asmc.2003.1194502
File:
PDF, 376 KB
english, 2003