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[IEEE 2013 International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM) - Novosibirsk, Russia (2013.07.1-2013.07.5)] 2013 14th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices - GaAs MBE on vicinal substrates Si(001): Impact of nucleation and growth conditions on surface morphology and crystallographic properties of the epitaxial layers
Petrushkov, Mikhail O., Putyato, Mikhail A., Semyagin, Boris R., Emelyanov, Eugene A., Feklin, Dmitry F., Preobrazhenskii, Valerii V.Year:
2013
Language:
english
DOI:
10.1109/edm.2013.6641932
File:
PDF, 531 KB
english, 2013