Piezoresistive Microphone Design Pareto Optimization: Tradeoff Between Sensitivity and Noise Floor
Papila, Melih, Haftka, Raphael T., Nishida, Toshikazu, Sheplak, MarkVolume:
15
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2006.883884
Date:
December, 2006
File:
PDF, 1.14 MB
english, 2006