A Novel Semianalytical Approach for Finding Pull-In...

Journal of Microelectromechanical Systems 2011 / 04 Vol. 20; Iss. 2

A Novel Semianalytical Approach for Finding Pull-In Voltages of Micro Cantilever Beams Subjected to Electrostatic Loads and Residual Stress Gradients

Ou, Kuang-Shun, Chen, Kuo-Shen, Yang, Tian-Shiang, Lee, Sen-Yung
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Volume:
20
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2011.2105246
Date:
April, 2011
File:
PDF, 1.06 MB
english, 2011
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