[IEEE 2010 18th International Conference on Advanced Thermal Processing of Semiconductors (RTP) - Gainesville, FL, USA (2010.09.28-2010.10.1)] 2010 18th International Conference on Advanced Thermal Processing of Semiconductors (RTP) - Comparison of Solid Phase Epi (SPE) non-melt to Liquid Phase Epi (LPE) melt laser annealing for 22nm node n+ USJ formation

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