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[IEEE 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (MEMS/MOEMS) - Nice, France (2008.04.9-2008.04.11)] 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - Study of first-order thermal ΣΔ architecture for convective accelerometers
Leman, Olivier, Mailly, Frederick, Latorre, Laurent, Nouet, PascalYear:
2008
Language:
english
DOI:
10.1109/dtip.2008.4752961
File:
PDF, 2.33 MB
english, 2008