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[IEEE 2009 IEEE International SOI Conference - Foster City, CA, USA (2009.10.5-2009.10.8)] 2009 IEEE International SOI Conference - From silicon direct wafer bonding to surface nano-patterning: a way to innovative substrate elaboration
Fournel, F., Bavard, A., Eymery, J.Year:
2009
Language:
english
DOI:
10.1109/soi.2009.5318788
File:
PDF, 1.65 MB
english, 2009