Diamond-on-Polymer Microelectrode Arrays Fabricated Using a Chemical Release Transfer Process
Hess, Allison E., Sabens, David M., Martin, Heidi B., Zorman, Christian A.Volume:
20
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2011.2159099
Date:
August, 2011
File:
PDF, 733 KB
english, 2011