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Nanoscale materials patterning and engineering by atomic force microscopy nanolithography
X.N. Xie, H.J. Chung, C.H. Sow, A.T.S. WeeVolume:
54
Year:
2006
Language:
english
Pages:
48
DOI:
10.1016/j.mser.2006.10.001
File:
PDF, 5.64 MB
english, 2006