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Isochronal annealing study of hydrogen interaction with implantation-induced point defects in p-type silicon
Yutaka Tokuda, Hisanori SatoVolume:
6
Year:
2003
Language:
english
Pages:
3
DOI:
10.1016/j.mssp.2003.05.006
File:
PDF, 175 KB
english, 2003