Observation of dislocations in strain-relaxed silicon–germanium thin films with flat surfaces grown on ion-implanted silicon substrates
Junji Yamanaka, Kentaro Sawano, Kiyokazu Nakagawa, Kumiko Suzuki, Yusuke Ozawa, Shinji Koh, Takeo Hattori, Yasuhiro ShirakiVolume:
7
Year:
2004
Language:
english
Pages:
4
DOI:
10.1016/j.mssp.2004.09.008
File:
PDF, 289 KB
english, 2004