Anticipation of nitrided oxides electrical thickness based...

Anticipation of nitrided oxides electrical thickness based on XPS measurement

J. Bienacel, D. Barge, M. Bidaud, N. Emonet, D. Roy, L. Vishnubhotla, I. Pouilloux, K. Barla
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Volume:
7
Year:
2004
Language:
english
Pages:
3
DOI:
10.1016/j.mssp.2004.09.014
File:
PDF, 179 KB
english, 2004
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