Anticipation of nitrided oxides electrical thickness based on XPS measurement
J. Bienacel, D. Barge, M. Bidaud, N. Emonet, D. Roy, L. Vishnubhotla, I. Pouilloux, K. BarlaVolume:
7
Year:
2004
Language:
english
Pages:
3
DOI:
10.1016/j.mssp.2004.09.014
File:
PDF, 179 KB
english, 2004