Properties of zirconium silicate thin films prepared by...

Materials Science in Semiconductor Processing 2004 Vol. 7; Iss. 4-6

Properties of zirconium silicate thin films prepared by laser ablation

M. Filipescu, N. Scarisoreanu, D.G. Matei, G. Dinescu, A. Ferrari, M. Balucani, O. Toma, C. Ghica, L.C. Nistor, M. Dinescu
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Volume:
7
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.mssp.2004.09.122
File:
PDF, 410 KB
english, 2004
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