Fine-Patterning of $\bf ZrO_{2}$ Thin Films by the...

Japanese Journal of Applied Physics 1994 / 8 Vol. 33; Iss. Part 2, No

Fine-Patterning of $\bf ZrO_{2}$ Thin Films by the Photolysis of Chemically Modified Gel Films

Shinmou, Katsuhide, Tohge, Noboru, Minami, Tsutomu
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Volume:
33
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.L1181
Date:
August, 1994
File:
PDF, 927 KB
1994
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