Ultra-short pulsed laser deposition and patterning of SiC thin films for MEMS fabrication
Monica Vendan, Pal Molian, Ashraf Bastawros, James AndereggVolume:
8
Year:
2005
Language:
english
Pages:
16
DOI:
10.1016/j.mssp.2006.02.002
File:
PDF, 681 KB
english, 2005