Ge substrates made by Ge-condensation technique: Challenges...

Materials Science in Semiconductor Processing 2006 Vol. 9; Iss. 4-5

Ge substrates made by Ge-condensation technique: Challenges and current understanding

Valentina Terzieva, Laurent Souriau, Francesca Clemente, Alessandro Benedetti, Matty Caymax, Marc Meuris
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Volume:
9
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.mssp.2006.08.069
File:
PDF, 520 KB
english, 2006
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