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Germanium-on-insulator (GeOI) substrates—A novel engineered substrate for future high performance devices
Takeshi Akatsu, Chrystel Deguet, Loic Sanchez, Frédéric Allibert, Denis Rouchon, Thomas Signamarcheix, Claire Richtarch, Alice Boussagol, Virginie Loup, Frédéric Mazen, Jean-Michel Hartmann, Yves CampVolume:
9
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.mssp.2006.08.077
File:
PDF, 507 KB
english, 2006