Effects of Post-Annealing on the Conduction Properties of...

Japanese Journal of Applied Physics 1997 / 7 Vol. 36; Iss. Part 1, No

Effects of Post-Annealing on the Conduction Properties of P t /( B a , S r ) T i O 3 / P t Capacitors for Dynamic Random Access Memory Applications

Joo, Jae-Hyun, Jeon, Yoo-Chan, Seon, Jeong-Min, Oh, Ki-Young, Roh, Jae-Sung, Kim, Jae-Jeong
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Volume:
36
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.4382
Date:
July, 1997
File:
PDF, 728 KB
1997
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