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[IEEE 11th International Conference on Ion Implantation Technology - Austin, TX, USA (16-21 June 1996)] Proceedings of 11th International Conference on Ion Implantation Technology - Comparison of zero degree and tilted arsenic MDD implants
Tripsas, N.H., Nayak, D., Luning, S.Year:
1997
Language:
english
DOI:
10.1109/IIT.1996.586107
File:
PDF, 235 KB
english, 1997