[IEEE Nanophotonics - Sapporo, Japan...

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[IEEE Nanophotonics - Sapporo, Japan (2010.08.9-2010.08.12)] 2010 International Conference on Optical MEMS and Nanophotonics - Compliant scanning micromirror actuated with a displacement amplification mechanism

Chen, Tzung-Ming, Schneider, Florian, Wallrabe, Ulrike
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Year:
2010
Language:
english
DOI:
10.1109/omems.2010.5672150
File:
PDF, 1.32 MB
english, 2010
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