[IEEE Nanophotonics - Sapporo, Japan (2010.08.9-2010.08.12)] 2010 International Conference on Optical MEMS and Nanophotonics - Compliant scanning micromirror actuated with a displacement amplification mechanism
Chen, Tzung-Ming, Schneider, Florian, Wallrabe, UlrikeYear:
2010
Language:
english
DOI:
10.1109/omems.2010.5672150
File:
PDF, 1.32 MB
english, 2010