[IEEE 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics - Hualien, Taiwan (2007.08.12-2007.07.16)] 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics - Micro Knife-edge Optical Measurement Devices Fabricated by SOI and CMOS MEMS Processes
Chang, Tzu-Lin, Tseng, Victor Farm-Guoo, Chiu, YiYear:
2007
Language:
english
DOI:
10.1109/omems.2007.4373825
File:
PDF, 263 KB
english, 2007