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[IEEE 1995 IEEE International SOI Conference - Tucson, AZ, USA (3-5 Oct. 1995)] 1995 IEEE International SOI Conference Proceedings - Implantation-induced-defect generation during device fabrication on a SIMOX substrate
Hyoung-Sub Kim,, Jeong-Seok Kim,, Dong-Uk Choi,, Gon-Sub Lee,, Do-Hyung Kim,, Kyu-Pil Lee,, Ki-Nam Kim,, Jong-Woo Park,Year:
1995
Language:
english
DOI:
10.1109/soi.1995.526508
File:
PDF, 271 KB
english, 1995