[IEEE 2008 IEEE/LEOS Internationall Conference on Optical MEMs and Nanophotonics - Freiburg, Germany (2008.08.11-2008.08.14)] 2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics - Performance improvement of a two-axis radial-vertical-combdrive scanner by using a symmetric spring design
Tien-liang Hsieh,, Yao-tien Chang,, Sheng-jie Chiou,, Jui-che Tsai,, Dooyoung Hah,, Wu, Ming C.Year:
2008
Language:
english
DOI:
10.1109/omems.2008.4607852
File:
PDF, 518 KB
english, 2008