[IEEE 1992 42nd Electronic Components & Technology Conference - San Diego, CA, USA (18-20 May 1992)] 1992 Proceedings 42nd Electronic Components & Technology Conference - Zero-defect sputter deposition metallization method for high-volume manufacturing of grafted multilayer thin film modules
Swirbel, T.Year:
1992
Language:
english
DOI:
10.1109/ECTC.1992.204337
File:
PDF, 415 KB
english, 1992