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[IEEE TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Denver, CO, USA (2009.06.21-2009.06.25)] TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Vacuum-gapped film bulk acoustic resonator for low-loss mass sensing in liquid
Pottigari, Sai Sumanth, Kwon, Jae WanYear:
2009
Language:
english
DOI:
10.1109/sensor.2009.5285541
File:
PDF, 365 KB
english, 2009