[IEEE 2014 Conference on Precision Electromagnetic Measurements (CPEM 2014) - Rio de Janeiro, Brazil (2014.8.24-2014.8.29)] 29th Conference on Precision Electromagnetic Measurements (CPEM 2014) - Electrical scanning probe microscopes to address industrial nano-metrology needs of integrated circuits and nanoelectronic devices
Kopanski, Joseph J.Year:
2014
Language:
english
DOI:
10.1109/cpem.2014.6898335
File:
PDF, 174 KB
english, 2014