Micromachining of Pyrex 7740 Glass by Silicon Molding and...

Journal of Microelectromechanical Systems 2011 / 08 Vol. 20; Iss. 4

Micromachining of Pyrex 7740 Glass by Silicon Molding and Vacuum Anodic Bonding

Liu, Junwen, Shang, Jintang, Tang, Jieying, Huang, Qing-An
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
20
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2011.2160043
Date:
August, 2011
File:
PDF, 1.08 MB
english, 2011
Conversion to is in progress
Conversion to is failed