Improvement of FinFET Electrical Characteristics by...

IEEE Electron Device Letters 2004 / 08 Vol. 25; Iss. 8

Improvement of FinFET Electrical Characteristics by Hydrogen Annealing

Xiong, W., Gebara, G., Zaman, J., Gostkowski, M., Nguyen, B., Smith, G., Lewis, D., Cleavelin, C.R., Wise, R., Yu, S., Pas, M., King, T.-J., Colinge, J.P.
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Volume:
25
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2004.832787
Date:
August, 2004
File:
PDF, 339 KB
english, 2004
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