Special reliability features for Hf-based high-/spl kappa/...

IEEE Transactions on Device and Materials Reliability 2005 / 03 Vol. 5; Iss. 1

Special reliability features for Hf-based high-/spl kappa/ gate dielectrics

Ma, T.P., Bu, H.M., Wang, X.W., Song, L.Y., He, W., Miaomiao Wang,, Tseng, H.-H., Tobin, P.J.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
5
Language:
english
Journal:
IEEE Transactions on Device and Materials Reliability
DOI:
10.1109/tdmr.2005.845329
Date:
March, 2005
File:
PDF, 847 KB
english, 2005
Conversion to is in progress
Conversion to is failed