[IEEE 2005 IEEE International Conference on Robotics and Biomimetics - ROBIO - Shatin, N.T. China ()] 2005 IEEE International Conference on Robotics and Biomimetics - ROBIO - Study of piezoelectric aluminum nitride thin film by RF magnetron sputtering
Shih-Jeh Wu,, Ting-Wai Shen,Year:
2005
Language:
english
DOI:
10.1109/robio.2005.246308
File:
PDF, 206 KB
english, 2005