[IEEE 2012 International Conference on Actual Problems of Electron Devices Engineering (APEDE) - Saratov, Russia (2012.09.19-2012.09.20)] 2012 International Conference on Actual Problems of Electron Devices Engineering - Mathematical calculation microwave plasma reactor for nanoelectronics
Bochkarev, A.O., Sivyakov, B.K.Year:
2012
Language:
russian
DOI:
10.1109/apede.2012.6478060
File:
PDF, 515 KB
russian, 2012