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[IEEE 2008 IEEE Custom Integrated Circuits Conference - CICC 2008 - San Jose, CA, USA (2008.09.21-2008.09.24)] 2008 IEEE Custom Integrated Circuits Conference - Frequency tunable silicon carbide resonators for MEMS above IC
Nabki, F., Dusatko, T. A., El-Gamal, M. N.Year:
2008
Language:
english
DOI:
10.1109/cicc.2008.4672054
File:
PDF, 1.06 MB
english, 2008