[IEEE 2004 International Electron Devices Meeting - San Francisco, CA (2004.12.13-2004.12.15)] IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004. - Process technology - advances in source drain engineering [Session 42]
Jones, K.S., Amaud, F.Year:
2004
Language:
english
DOI:
10.1109/iedm.2004.1419369
File:
PDF, 35 KB
english, 2004