![](/img/cover-not-exists.png)
[IEEE 2013 International Conference on Circuits, Power and Computing Technologies (ICCPCT) - Nagercoil (2013.3.20-2013.3.21)] 2013 International Conference on Circuits, Power and Computing Technologies (ICCPCT) - Modeling of MEMS capacitive differential pressure sensor
Eswaran, Parthasarathy, Malarvizhi, S.Year:
2013
Language:
english
DOI:
10.1109/iccpct.2013.6528946
File:
PDF, 2.34 MB
english, 2013