Reactive sputtering of high moment Fe-N soft magnetic films...

IEEE Transactions on Magnetics 2001 / 07 Vol. 37; Iss. 4

Reactive sputtering of high moment Fe-N soft magnetic films with in-situ plasma diagnosis and control

Pan, G., Wang, I., Buckley, R., Kang, K., Petford-Long, A.
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Volume:
37
Language:
english
Journal:
IEEE Transactions on Magnetics
DOI:
10.1109/20.951149
Date:
July, 2001
File:
PDF, 82 KB
english, 2001
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