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[IEEE IEEE International Solid-State Sensors and Actuators Conference - Boston, MA, USA (8-12 June 2003)] TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) - Fabrication of nanochannels using glass to glass anodic bonding
Kutchoukov, V.G., Laugere, F., van der Vlist, W., Pakula, L., Garini, Y., Alkemade, P.F.A., Bossche, A.Volume:
2
Year:
2003
Language:
english
DOI:
10.1109/sensor.2003.1217018
File:
PDF, 410 KB
english, 2003