[IEEE IEEE International Solid-State Sensors and Actuators...

[IEEE IEEE International Solid-State Sensors and Actuators Conference - Boston, MA, USA (8-12 June 2003)] TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) - Fabrication of nanochannels using glass to glass anodic bonding

Kutchoukov, V.G., Laugere, F., van der Vlist, W., Pakula, L., Garini, Y., Alkemade, P.F.A., Bossche, A.

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Volume:

Year:

2003

Language:

english

DOI:

10.1109/sensor.2003.1217018

File:

PDF, 410 KB

english, 2003

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