The Effect of Thermal Shocks on the Stresses in a Sapphire...

IEEE Transactions on Semiconductor Manufacturing 2006 / 11 Vol. 19; Iss. 4

The Effect of Thermal Shocks on the Stresses in a Sapphire Wafer

Vodenitcharova, T., Zhang, L. C., Zarudi, I., Yin, Y., Domyo, H., Ho, T.
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Volume:
19
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2006.883591
Date:
November, 2006
File:
PDF, 240 KB
english, 2006
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