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[IEEE 2014 15th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) - Belgium (2014.04.7-2014.04.9)] 2014 15th International Conference on Thermal, Mechanical and Mulit-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) - Using molecular modeling to uncover the origins of subtle solvation-based film defects
Iwamoto, Nancy, Baldwin, TeriYear:
2014
Language:
english
DOI:
10.1109/eurosime.2014.6813770
File:
PDF, 33 KB
english, 2014